发明名称 BONDING MATERIAL, SEMICONDUCTOR DEVICE, AND METHOD OF MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a bonding material that achieves higher bonding strength and higher fracture toughness than those of the conventional art while being free from a lead component regarding a bonding layer of an electrical bonding part in an electronic component, to provide a semiconductor device having the bonding material as a bonding layer, and to provide a method of manufacture the semiconductor device. <P>SOLUTION: The semiconductor device is configured such that electronic members are electrically connected to each other via a bonding layer. The bonding layer is a composite-metal sintered compact in which a metal X, whose hardness is higher than that of Ag, forms dispersion phases in an Ag matrix comprising crystal grains of 10-1,000 nm. The composite-metal sintered compact is configured as follows. The interface between the Ag matrix and each metal X dispersion phase is metal-bonded. The interface between the outermost surface of the electronic member and the Ag matrix is metal-bonded. The interface between the outermost surface of the electronic member and each metal X dispersion phase is metal-bonded. Each metal X phase is a single crystalline body or a polycrystalline body. Each metal X dispersion phase of the polycrystalline body is configured such that its internal grain boundary is metal-bonded without via an oxide coating layer. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010050189(A) 申请公布日期 2010.03.04
申请号 JP20080211477 申请日期 2008.08.20
申请人 HITACHI METALS LTD 发明人 IDE HIDEKAZU;MORITA TOSHIAKI;YASUDA TAKESUKE
分类号 H01L21/52;B22F1/00;B22F1/02;C22C5/06;H05K3/32 主分类号 H01L21/52
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