| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and an apparatus for cleaning a to-be-cleaned article which remove oil adhered to the article reliably and allow restoration and retention of the cleaning power by regenerating the solvent to be used in clearing the article. SOLUTION: After oil D adhered to the article A is separated by dissolving it in a hydrocarbon type solvent B, the hydrocarbon type solvent B remaining on the article A is separated by dissolving it in a fluorine type solvent C. A mixed solvent BC comprising the hydrocarbon type solvent B containing the oil D dissolved therein and the regenerated fluorine type solvent C are warmed to a temperature lower than and close to the boiling point of the fluorine type solvent C. The fluorine type solvent C is dissolved in the hydrocarbon type solvent B so as to separate the oil D which is insoluble in the fluorine type solvent C. The mixed solvent BC after the separation of the oil D is cooled to a temperature lower than the boiling points of the hydrocarbon type solvent B and the fluorine type solvent C to be separated into the hydrocarbon type solvent B and the fluorine type solvent C for regeneration and used repeatedly in cleaning the article A. COPYRIGHT: (C)2010,JPO&INPIT
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