发明名称 METHOD FOR MANUFACTURING COMPOUND SEMICONDUCTOR, METHOD FOR MANUFACTURING SEMICONDUCTOR LIGHT-RECEIVING ELEMENT, COMPOUND SEMICONDUCTOR, AND THE SEMICONDUCTOR LIGHT-RECEIVING ELEMENT
摘要 PROBLEM TO BE SOLVED: To provide a method for manufacturing a compound semiconductor that has a high light-receiving sensitivity in a wavelength range on the long-wavelength side, and to provide a method for manufacturing a semiconductor light-receiving element, a compound semiconductor, and the semiconductor light-receiving element. SOLUTION: A compound semiconductor includes at least In, Ga, As, and Sb on an InP substrate. At least one among the group V materials to be used, when manufacturing the compound semiconductor, is the group V material of an organic metal containing a dimethylamino group. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010050176(A) 申请公布日期 2010.03.04
申请号 JP20080211295 申请日期 2008.08.20
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 MITSUHARA MANABU;FUKANO HIDEKI;SATO TOMONARI;KONDO YASUHIRO
分类号 H01L31/10 主分类号 H01L31/10
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