| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a compacted deformable mirror. Ž<P>SOLUTION: The deformable mirror comprises: a thin film 211; a first frame 214 holding the thin film 211 over the whole circumference; an optically transparent first substrate 222 fixed to the first frame 214; a second frame 219 fixed to the first frame 214; and a second substrate 251 fixed to the second frame 219. The thin film 211 has a reflective film 212 at the upper face and a thin film electrode 213 at the lower face. The first substrate 222 is located at the side of the reflective film 212 apart from the thin film 211. The second frame 219 is located at the side of the thin film electrode 213. The second substrate 251 is located at the side of the thin film electrode 213 apart from the thin film 211, and has a driving electrode 252 opposite to the thin film electrode 213. The thin film 211, the first frame 214 and the first substrate 222 define a first sealing chamber 223, and the thin film 211, the first frame 214, the second frame 219 and the second substrate 251 define a second sealing chamber 224. The deformable mirror has a gas flow passage 201 connecting the first sealing chamber 223 and the second sealing chamber 224. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
