发明名称 CONTACT STRUCTURE FOR SEMICONDUCTOR DEVICE AND FORMING METHOD OF THE SAME
摘要 PURPOSE: A contact structure for a semiconductor device and a forming method of the same are provided to improve constant resistance by forming a contact surface of a junction region and a contact plug to be a curved surface. CONSTITUTION: A gate insulating layer is formed on a semiconductor substrate(101). The gate pattern(SG,CG) is laminated on the gate insulating layer. A junction region(101a) is formed in the semiconductor substrate. The surface of the junction region is a curved surface. The insulating layer is formed on the semiconductor substrate. The contact plug passes through the insulating layer. The contact plug is contacted to the curved surface of the junction region.
申请公布号 KR20100023138(A) 申请公布日期 2010.03.04
申请号 KR20080081746 申请日期 2008.08.21
申请人 HYNIX SEMICONDUCTOR INC. 发明人 PARK, CHANG KI
分类号 H01L21/28 主分类号 H01L21/28
代理机构 代理人
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