| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate processing method capable of precisely arranging the surface of a substrate at a target position for processing the substrate. <P>SOLUTION: The substrate processing method includes: a step for sequentially arranging a plurality of regions to be processed provided on the substrate to a process execution region, to detect a surface position of the substrate for each region; and a step for sequentially arranging the plurality of the regions to the process execution region, and adjusting a relative position between the surface of the substrate and a predetermined surface based on the detection result of the surface position, for each region, to carry out a predetermined process. <P>COPYRIGHT: (C)2010,JPO&INPIT |
