| 摘要 |
PROBLEM TO BE SOLVED: To provide a measuring method to measure divergence angles in X direction and Y direction of ion beams of ribbon form. SOLUTION: This ion beam measuring method uses a mask plate 60 having a small hole 62 to pass a part of ion beams 2 and a beam monitor 10 which is installed at the downstream side and has a plurality of beam detectors 12 to receive the ion beams passing through the small hole and respectively detect the beam current, which are located in X direction and movable in Y direction. Then, by moving the beam monitor 10 in the Y direction, the center positions x<SB>3</SB>, y<SB>3</SB>in the X direction and Y direction of the ion beams which have passed through the small hole 62 are respectively measured. Then, based on the distance L<SB>4</SB>, L<SB>5</SB>in the X direction and Y direction between the corresponding center positions x<SB>3</SB>, y<SB>3</SB>and the small hole 62 and the distance L<SB>3</SB>in Z direction between the mask plate 60 and the beam monitor 10, the divergence anglesα<SB>x</SB>,α<SB>y</SB>in the X direction and Y direction of the ion beams passing through the small hole 62 are respectively measured. COPYRIGHT: (C)2010,JPO&INPIT
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