发明名称 LASER PROCESSING DEVICE AND LASER PROCESSING METHOD
摘要 A laser processing device (1) is provided with a laser light source (10), a spatial light modulator (20), a control section (22), and a light collection optical system (30).  The spatial light modulator (20) inputs the laser light outputted from the laser light source (10), presents a hologram for modulating the phase of the laser light in each of a plurality of two-dimensionally arrayed pixels, and outputs the phase-modulated laser light.  The control section (22) causes part of the phase-modulated laser light (incident light) to be collected as laser light (contribution light) having constant energy not less than a predetermined threshold (X) at a light collecting position present in a processing area.  Meanwhile, the control section (22) causes laser light (unwanted light) other than the contribution light collected at the light collecting position existing in the processing area to be diffused and collected as a plurality of laser light (non-contribution light) beams having energy less than the predetermined threshold (X) at a light collecting position present in a non-processing area.
申请公布号 WO2010024218(A1) 申请公布日期 2010.03.04
申请号 WO2009JP64725 申请日期 2009.08.24
申请人 HAMAMATSU PHOTONICS K.K.;MATSUMOTO NAOYA;INOUE TAKASHI;FUKUCHI NORIHIRO;ITO HARUYASU 发明人 MATSUMOTO NAOYA;INOUE TAKASHI;FUKUCHI NORIHIRO;ITO HARUYASU
分类号 B23K26/00;B23K26/06;B23K26/067;B23K26/073;G02F1/061 主分类号 B23K26/00
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