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发明名称
摘要
申请公布号	JP2010507223(A)	申请公布日期	2010.03.04
申请号	JP20090519008	申请日期	2007.07.09
申请人		发明人
分类号	H01L21/336;H01L21/28;H01L29/417;H01L29/423;H01L29/49;H01L29/786;H01L51/05;H01L51/30	主分类号	H01L21/336
代理机构		代理人
主权项
地址

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