| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a thermal flowmeter for improving measurement precision. <P>SOLUTION: Upper side and lower side thermal sensors 3a, 3b are arranged so as to be reverse to flow of fluid. The upper side and lower side thermal sensors 3a, 3b are arranged to be reverse in a flow direction of the fluid. Difference data for calculating a flow rate are obtained by executing difference processing for detection signals (temperature difference data) of the thermal sensors 3a, 3b. An influence amount due to temperature and pressure is canceled by executing difference processing, thereby the drift of an output zero point i.e. influence of disturbance is suppressed. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
