PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC DEVICE, ATOMIC CLOCK AND METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATOR

摘要

The piezoelectric vibrator is provided with a piezoelectric vibrating piece and a metal film getter material. The piezoelectric vibrating piece has a pair of vibrating arm sections, which are connected to each other and extending parallel to a base substrate and a lid substrate having a cavity formed in between, and the piezoelectric vibrating piece is mounted on the base substrate in the cavity. The metal film getter material is formed on the base substrate or the lid substrate so that the getter material is arranged in the cavity, and the getter material improves vacuum degree in the cavity when heated. On the base substrate or the lid substrate, a regulating section is formed for suppressing the quantity of the getter material that scatters toward the vibrating arm sections by regulating the scattering direction of the getter material which evaporates when heated.