DEFECT INSPECTING SYSTEM, AND DEFECT INSPECTING METHOD

摘要

When a bright-field image is photographed by a first camera with a transmitted light projected from a first linear light source and having passed through a plate member, an optical path shielding member having a knife edge shape is disposed at a position in the optical path of the transmitted light of the first camera and in front of the first camera.  The region of a bright portion is searched from the photographed bright-field image by using a signal value higher than that of the background component of the bright-field image, as a threshold value.  The region of the bright portion is used, when extracted as a result of the search, to discriminate whether or not a defective region is in the plate member.