摘要 |
<p><P>PROBLEM TO BE SOLVED: To attain a sensor device and a method for manufacturing the same which enhances the yield of the sensor device. <P>SOLUTION: An aperture 43 is formed between a sensor chip 20 and a recess 42 and the aperture 43 opens on the side of a second holding part 44. A wall 50 blocks up the surrounding of the opening of the aperture. For this reason, a sealing material 90 of low viscosity which seals a circuit chip 30 is prevented by the wall 50 from leaking into the aperture 43. Accordingly, since there is no need to dispose a minute cushioning member with high accuracy for filling up the aperture 43, as in normal practice, yield of the sensor device is enhanced. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |