发明名称 LARGE PELLICLE STORAGE CONTAINER AND METHOD FOR MANUFACTURING THE SAME
摘要 <p><P>PROBLEM TO BE SOLVED: To provide a storage container for a large pellicle in which rigidity can be improved without deteriorating a cleaning property even if the container is particularly manufactured by vacuum molding, and to provide a method for manufacturing the container. <P>SOLUTION: The storage container for a large pellicle is used for housing, storing and carrying a pellicle 1 and is composed of a tray 2 formed of a resin material to store the pellicle 1, and a lid 3 formed of a resin material and covering the tray 2 wherein a reinforcing plate 4 is attached on an outer face of at least either the tray 2 or the lid 3 so as to eliminate concavo-convex portions of the outer surface. <P>COPYRIGHT: (C)2010,JPO&INPIT</p>
申请公布号 JP2010049266(A) 申请公布日期 2010.03.04
申请号 JP20090216369 申请日期 2009.09.18
申请人 ASAHI KASEI E-MATERIALS CORP 发明人 KURIYAMA YOSHIMASA;WAKIMOTO ICHIRO
分类号 B65D85/86;G03F1/62;H01L21/673 主分类号 B65D85/86
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