发明名称 |
LARGE PELLICLE STORAGE CONTAINER AND METHOD FOR MANUFACTURING THE SAME |
摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a storage container for a large pellicle in which rigidity can be improved without deteriorating a cleaning property even if the container is particularly manufactured by vacuum molding, and to provide a method for manufacturing the container. <P>SOLUTION: The storage container for a large pellicle is used for housing, storing and carrying a pellicle 1 and is composed of a tray 2 formed of a resin material to store the pellicle 1, and a lid 3 formed of a resin material and covering the tray 2 wherein a reinforcing plate 4 is attached on an outer face of at least either the tray 2 or the lid 3 so as to eliminate concavo-convex portions of the outer surface. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
申请公布号 |
JP2010049266(A) |
申请公布日期 |
2010.03.04 |
申请号 |
JP20090216369 |
申请日期 |
2009.09.18 |
申请人 |
ASAHI KASEI E-MATERIALS CORP |
发明人 |
KURIYAMA YOSHIMASA;WAKIMOTO ICHIRO |
分类号 |
B65D85/86;G03F1/62;H01L21/673 |
主分类号 |
B65D85/86 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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