| 摘要 |
PROBLEM TO BE SOLVED: To provide a cryopump having an increased maximum gas storage amount. SOLUTION: The cryopump 10 comprises a cryopump case 34 having a cryopump opening 31, a first shield member 50 extending from the cryopump opening 31 to the inside of the cryopump case 34 in no contact with the cryopump case 34, and a second shield member 52 provided in the cryopump case 34 extending from a position apart from the cryopump opening 31 via a space from the first shield member 50 to the inside of the cryopump case 34 in no contact with the cryopump case 34. Herein, a radiation shield 16 is provided where a space 58 between itself and the second shield member 52 is smaller than a space 56 between the cryopump case 34 and the first shield member 50. COPYRIGHT: (C)2010,JPO&INPIT
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