| 摘要 |
PURPOSE: A probe needle polishing device of a probe card is provided to train the end part of a probe needle in a horizontal state by regularly operating the fixing and pressing of the probe card with a fixing unit. CONSTITUTION: A supporting frame(20) is installed inside a main body(10). A holder(30) forms a through hole(31) in a center and includes a holding surface(32) settling a probe card in the upper part. The holder is composed of a open groove(33) which make it possible to look at inside from the outside by being connected to the penetration hole. A plurality of fixing units(40) pressurizes the probe card settled in the holding surface. A chuck driving device(70) is installed in the supporting frame. The chuck driving device circulates the chuck(72) to the inner side of the through hole.
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