发明名称 GYRO OSCILLATOR AND MANUFACTURING METHOD OF SAME
摘要 <P>PROBLEM TO BE SOLVED: To provide a gyro oscillator capable of reducing the influence of air resistance in balance tuning of a vibration arm section for drive in a gyro element performed in the air, and to provide a method of manufacturing the gyro oscillator. <P>SOLUTION: The gyro oscillator has: a gyro element 10 that is formed flatly and has a base section 11, vibration arm sections 14a, 14b, 15a, 15b for drive extended from the base section 11, and vibration arm sections 12a, 12b for detection extended from the base section 11; a package 20 that has a base section 21 for mounting the gyro element 10 while the inside for storing the gyro element 10 is sealed in vacuum. The gyro oscillator has a first gap L1 and a second gap L2 between the base section 21 of the package 20 and the gyro element 10. The first gap L1 is larger than the second gap L2. The first gap L1 is provided between the base section 21 and the vibration arm sections 14a, 14b, 15a, 15b for drive of the gyro element 10. <P>COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010048688(A) 申请公布日期 2010.03.04
申请号 JP20080213630 申请日期 2008.08.22
申请人 EPSON TOYOCOM CORP 发明人 KATAYAMA MITSUHIRO;KIKUCHI TAKAYUKI
分类号 G01C19/56;G01P9/04 主分类号 G01C19/56
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