| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a practical substrate transport system which detects a load position of a substrate, has sensors on arms of a transport robot, and is free from a problem of disconnection of signal lines or power introducing wiring caused by wear. Ž<P>SOLUTION: When a transport robot in a transport chamber transports a substrate by holding the substrate with ends of its arms, sensors 71 installed on the arms monitor whether the substrate is held at a correct position, and a signal processor 73 provided on the outside of the transport chamber processes the signals from the sensors 71 to determine whether the substrate is at the correct position. A transmitting system which transmits the signals from the sensors 71 to the signal processor 73 transmits the signals through an optical communication unit 76 which makes optical communication through a light transmitting plate 102 installed in the transport chamber in a way that the plate 102 isolates the vacuum in the transport chamber from the outside atmosphere. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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