| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a droplet drying method for evaporating water from droplets attached to the surface of a substrate. Ž<P>SOLUTION: In place of the conventional droplet drying method that treats the substrate with droplets, the present droplet drying method includes: a preparation step of preparing a droplet holding tool, in which a cavity connected to an opening is formed, a ring shaped edge part surrounding the opening is present and the opening faces the surface of the substrate, and the droplet holding tool is supported so that the cavity covers a droplet attached to the surface of the substrate and does not contact the droplet attached to the surface of the substrate, and is configured to suck the atmosphere from the gap between the surface of the substrate and the edge part and can exhaust outside from the depth of the cavity; an exhaust step of exhausting the gas in the cavity from the depth of the cavity to outside; and a supporting step of maintaining the separation between the surface of the substrate and the edge part at a predetermined distance by supporting the droplet holding tool. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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