| 摘要 |
A pressure sensor includes a first set of electrodes, a second set of electrodes, and a common electrode. The first and second sets of electrodes overlie an insulative surface, wherein the first set of electrodes represent sense capacitor bottom electrodes and the second set of electrodes represent reference capacitor bottom electrodes. The second set of electrodes is configured in an interleaved arrangement with the first set of electrodes, wherein the geometry of individual electrodes of the first set of electrodes substantially matches the geometry of individual electrodes of the second set of electrodes. In addition, the common electrode represents a sense and reference capacitor top electrode that is (i) overlying, (ii) spaced from, and (iii) configured in connection with the first and second sets of electrodes to form a common pressure cavity, wherein the common electrode includes first portions corresponding to sense membrane portions and second portions corresponding to reference membrane portions, further wherein an area of a sense membrane portion is greater than an area of a reference membrane portion.
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