PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIO CLOCK, AND METHOD FOR MANUFACTURING PIEZOELECTRIC VIBRATOR

摘要

A piezoelectric vibrator having a pair of vibration arms extending in parallel with a base substrate and a lid substrate bonded with each other so as to have a cavity therebetween, a pair of excitation electrodes for vibrating the pair of vibration arms, and a mount electrode electrically connected with the pair of excitation electrodes is further provided with a piezoelectric vibration piece mounted on the base substrate in the cavity through the mount electrode, an insulating film formed on the piezoelectric vibration piece to cover the excitation electrodes, and a getter member composed of a metal material for enhancing the vacuum degree in the cavity by being heated and so formed on one of the base substrate and the lid substrate as to be arranged in the cavity.