发明名称 PHOTOELECTRIC ENCODER
摘要 <P>PROBLEM TO BE SOLVED: To provide a photoelectric encoder capable of reconciling heightening of an averaging effect with reduction of the total of a bonding capacity of a plurality of photodiodes constituting a light receiving chip. Ž<P>SOLUTION: In the light receiving chip 15 of this photoelectric encoder, a plurality of photodiodes 23 are arranged in an array shape along a measuring axis X. A pitch P<SB>1</SB>of a PD 23 arranged on the end 31 of the array and a width W<SB>1</SB>of a light receiving surface 25 are set to be smaller than a pitch P<SB>2</SB>thereof arranged on the center 29 of the array and a width W<SB>2</SB>thereof, respectively. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010048833(A) 申请公布日期 2010.03.04
申请号 JP20090275237 申请日期 2009.12.03
申请人 MITSUTOYO CORP 发明人 KOJIMA KENJI
分类号 G01D5/36 主分类号 G01D5/36
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