发明名称 Methods of manufacturing CMOS image sensors
摘要 Complementary metal-oxide semiconductor (CMOS) image sensors (CIS) and methods of manufacturing the same are provided, the sensors include an epitaxial layer on a substrate in which a first, second, third and fourth region are defined. A photodiode may be formed at an upper portion of the epitaxial layer in the first region. A plurality of gate structures may be formed on the epitaxial layer in the second, third and fourth regions. A first blocking layer may be formed on the gate structures and the epitaxial layer in the first and second regions. A first impurity layer may be formed at an upper portion of the epitaxial layer adjacent to the gate structures in the second region, and a second impurity layer at upper portions of the epitaxial layer adjacent to the gate structures in the third and fourth regions. A color filter layer may be formed over the photodiode. A microlens may be formed on the color filter layer.
申请公布号 US2010055823(A1) 申请公布日期 2010.03.04
申请号 US20090461903 申请日期 2009.08.27
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM UI-SIK;PARK YOUNG-HOON;PARK WON-JE;SEONG DAE-CHEOL;YOON YEO-JU;KANG BO-BAE
分类号 H01L31/18 主分类号 H01L31/18
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