发明名称 THIN FILM TRANSISTOR ARRAY SUBSTRATE AND METHOD OF FABRICATING THEREOF
摘要 A thin film transistor array substrate includes a substrate, a plurality of poly-silicon islands and a plurality of gates. The substrate has a display region, a gate driver region and a source driver region. Each poly-silicon island disposed on the substrate has a source region, a drain region and a channel region disposed therebetween. The poly-silicon islands include several first poly-silicon islands and several second poly-silicon islands. The first poly-silicon islands having main grain boundaries and sub grain boundaries are only disposed within the display region and the gate driver region. The main grain boundaries of the first poly-silicon islands are only disposed within the source regions and/or the drain regions. The second poly-silicon islands are disposed in the source driver region. Grain sizes of the first poly-silicon islands are substantially different from those of the second poly-silicon islands. Gates corresponding to the channel regions are disposed on the substrate.
申请公布号 US2010051950(A1) 申请公布日期 2010.03.04
申请号 US20080337583 申请日期 2008.12.17
申请人 AU OPTRONICS CORPORATION 发明人 SUN MING-WEI;CHAO CHIH-WEI
分类号 H01L29/04;H01L21/36;H01L21/84 主分类号 H01L29/04
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