CONTINUOUS FILM FORMING APPARATUS

摘要

Provided is a continuous film forming apparatus wherein replacement operations of a feeding unit and a take-up unit are easily performed.  The continuous film forming apparatus is provided with: a vacuum chamber (1); a film forming roll (2); evaporation sources (7L1, 7L2, 7R) which supply a film forming substance to a material from the side of the material which is wound on the film forming roll and on which a film is to be formed; a feeding unit (3) which supplies the material to the film forming roll (2); and a take-up unit (4) which takes up the material after the film is formed thereon.  The vacuum chamber (1) is provided with: an evaporation source opening for carrying out and carrying in the evaporation sources; evaporation source door sections (16L, 16R) which open and close the evaporation source opening; another opening provided for the material on which the film is to be formed, besides the evaporation source opening, for the purpose of carrying out and carrying in the feeding unit (3) and the take-up unit (4); and door sections (17L, 17R) which are provided for the material and open and close the opening provided for the material.