| 发明名称 |
ELECTROSTATIC CHUCK AND METHOD FOR PRODUCING SAME |
| 摘要 |
<p>An electrostatic chuck composed of a ceramic member which is obtained by firing in a non-oxidizing atmosphere, and is mainly composed of yttrium oxide, while containing elemental cerium. Consequently, the electrostatic chuck is composed of a ceramic member having high corrosion resistance and low volume resistivity, and has a strong attracting force utilizing Johnsen-Rahbeck force.</p> |
| 申请公布号 |
WO2010024354(A1) |
申请公布日期 |
2010.03.04 |
| 申请号 |
WO2009JP65002 |
申请日期 |
2009.08.27 |
| 申请人 |
TOTO LTD.;ANDO, MASAMI;IDE, TAKAYUKI;ARIMITSU, HIROMI |
发明人 |
ANDO, MASAMI;IDE, TAKAYUKI;ARIMITSU, HIROMI |
| 分类号 |
H01L21/683;H02N13/00 |
主分类号 |
H01L21/683 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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