发明名称 SHEET PEELING APPARATUS AND METHOD
摘要 PROBLEM TO BE SOLVED: To provide a sheet peeling apparatus capable of peeling off an adhesive sheet smoothly and inexpensively in accordance with a type of the adhesive sheet to be peeled off. SOLUTION: The sheet peeling apparatus M for peeling off an adhesive sheet S from an adherend W, on a surface of which the adhesive sheet S is stuck, includes: a feed-out means 2 for feeding out a peeling sheet; a coating means 3 for coating an adhesive SA at least on one of the peeling sheet PS or the adhesive sheet S; a sticking means 4 for sticking the peeling sheet PS with the adhesive sheet S via the adhesive SA; a lock means 5 for restraining the feed-out of the peeling sheet PS; and a moving means 6 for relatively moving the adherend W and the peeling sheet PS. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010050447(A) 申请公布日期 2010.03.04
申请号 JP20090173713 申请日期 2009.07.24
申请人 LINTEC CORP 发明人 KOBAYASHI KENJI;YOSHIOKA TAKAHISA
分类号 H01L21/683 主分类号 H01L21/683
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