| 摘要 |
PROBLEM TO BE SOLVED: To provide a pressure sensor to reduce the errors of pressure measurement that accompany temperature variations. SOLUTION: The pressure sensor 10 includes a housing 12, a pressure-receiving means (diaphragm 24), which seals aperture 22 of the housing to transmit external pressure to inside the housing 12, and a pressure-sensitive element 40, having a pressure-sensitive section (vibrating arm) 40c and a pair of bases (a first base 40a, a second base 40b), connected to both ends of the pressure-sensitive section. In this sensor, a straight line which connects the pair of bases and displacement direction of the pressure-receiving means are arranged in parallel with force sensing direction serving as its detecting axis, and one of the bases (the first base 40a) is connected to central region 24a of the pressure-receiving means displaced by the pressure, while the other of the bases (the second base 40b) is connected to a peripheral region 24c on the fixed side of the pressure receiving means via connecting member 42. COPYRIGHT: (C)2010,JPO&INPIT
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