| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a highly reliable liquid droplet delivering head which is excellent in dimensional accuracy and chemical resistance and is capable of high-quality printing for a long period of time, and to provide a highly reliable liquid droplet delivering apparatus equipped with the liquid droplet delivering head. Ž<P>SOLUTION: The inkjet recording head 1 includes a substrate 20 in which delivering liquid storing chambers 21 are formed, a nozzle plate 10 provided on the undersurface of the substrate 20 and equipped with nozzle holes 11, and a sealing sheet 30 provided on the upper surface of the substrate 20 so as to cover the delivering liquid storing chambers 21. The substrate 20 and the nozzle plate 10 are bonded to each other via a bonding film 15. The bonding film 15 is formed by the plasma polymerization method, including both an Si skeleton which has a random atomic structure including siloxane bonds, and leaving groups bonded to the Si skeleton. The leaving groups existing near the surface of the bonding film 15 are left from the Si skeleton by applying an energy, and the substrate 20 and the nozzle plate 10 are bonded to each other by an adhesiveness generated at the bonding film 15. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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