发明名称 APPARATUS FOR TESTING SEMICONDUCTOR DEVICES
摘要 A probing apparatus comprises a housing, a device holder positioned in the housing and configured to receive a device under test, a temperature-controller positioned in the device holder, a platen positioned on the housing and configured to retain at least one probe, and a flow line positioned in the platen, wherein the flow line is configured to flow a fluid therein to adjust the temperature of the platen.
申请公布号 US2010052720(A1) 申请公布日期 2010.03.04
申请号 US20090401908 申请日期 2009.03.11
申请人 STAR TECHNOLOGIES INC. 发明人 LOU CHOON LEONG
分类号 G01R31/02 主分类号 G01R31/02
代理机构 代理人
主权项
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