GASEOUS SELF-ASSEMBLED MONOLAYER COATING APPARATUS

摘要

Disclosed is a gaseous, self-assembled monolayer coating apparatus which is capable of reducing installation space and cutting down on manufacturing cost. The apparatus is installed in one side of a chamber providing a space for mounting a substrate and comprises one or more syringe-shaped precursor injection units. Furthermore, the apparatus comprises one or more precursor supply units which supply liquefied precursor to the precursor injection unit.