APPARATUS AND METHOD FOR SOLUTION COATING THIN LAYERS
摘要
An apparatus and method for solution coating layers onto a substrate of an electronic device. A slot die coater in conjunction with a vacuum assist device is used in priming, coating and cleaning stations to produce thin layers having performance advantages over competing technologies.
申请公布号
WO2009143132(A3)
申请公布日期
2010.03.04
申请号
WO2009US44487
申请日期
2009.05.19
申请人
E. I. DU PONT DE NEMOURS AND COMPANY;LANG, CHARLES, D.;FAIRCLOTH, TAMI, JANENE
