| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an optical apparatus in which a movable mirror is largely rocked by a small driving force. Ž<P>SOLUTION: Supporting parts 19, 21, 23 and 25 are abutted on the back face of a movable mirror 36, and provide a supporting point 18 for the movable mirror which rocks so that the first end 32 of the movable mirror 36 approaches a substrate 14, and a supporting point 24 for the movable mirror which rocks so that the second end 40 of the movable mirror approaches the substrate 40. Actuators 30, 42 select arbitral one of the first end 32 and the second end 14 of the movable mirror and make the end 32 or the end 40 on the selected side of the movable mirror approach the substrate 14. Connection parts 52, 54, 56 and 58 connect the movable mirror 36 to the substrate 14 in a state of allowing a relative motion in which (1) the movable mirror 36 rocks in a direction in which the movable mirror 36 separates from the supporting point 24 on the second end side centering on the supporting part 18 of the first end side, and (2) the movable mirror rocks in the direction in which the movable mirror separates from the supporting point 18 at the first end side centering on the supporting part 24 of the second end side. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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