| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a member having a hard film formed thereon which is superior in abrasion resistance and is superior also in such film-removing properties that the damaged hard film can be easily removed when the member is reconditioned and used. <P>SOLUTION: The member 10a having the hard film formed thereon has the hard film 4 provided on a substrate 1. The hard film 4 has stacked structures which include an A layer 2 of which the composition satisfies Ti<SB>v</SB>M<SB>1-v</SB>(C<SB>x</SB>N<SB>y</SB>O<SB>z</SB>), (wherein M represents a predetermined element; and v, x, y and z each represent a predetermined amount of an atom ratio), and a B layer 3 of which the composition satisfies Ti<SB>v</SB>Cr<SB>w</SB>M<SB>1-v-w</SB>(C<SB>x</SB>N<SB>y</SB>O<SB>z</SB>), (wherein M represents a predetermined element; and v, w, x, y and z each represent a predetermined amount of an atom ratio), so that the A layer 2 and the B layer 3 are alternately stacked in this order. When a stacked structure of one layer of the A layer 2 and one layer of the B layer 3 on the upper part is assumed to be one unit, the hard film 4 includes two units or more of the stacked structures. The ratio of the thickness of one layer of the B layer 3 to that of one layer of the A layer 2 is 2 or more, the thickness of one layer of the A layer 2 is 0.1 to 3μm, the thickness of one layer of the B layer 3 is 1 to 10μm, and the total thickness of the B layer 3 is 5μm or more. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
