| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas mixer without the need of any electric power source which maintains a high mixing accuracy, has a broad rangeability and has a small pressure loss. SOLUTION: The gas mixer mixing a gas liquefied at the atmospheric temperature and a gas which is vapor at the atmospheric temperature comprises a concentration controller (2) and an automatic switching mechanism (3). The concentration controller (2) includes, a plurality of flow rate controllers (12) disposed in parallel in which respective laminar flow elements (6) (7) are disposed on a liquified gas introducing passage (4) and a compressed gas introducing passage (5); an equalizing valve (8) mounted on the compressed gas introducing passage (5) upstream of the laminar flow element (7) equalizes inflow pressures to bothe laminar flow elements (6)(7); and a liquified gas outflow passage (10) and a compressed gas outflow passage (11) downstream of the laminar flow passage (6)(7) are made to join through a check valve (9). In the automatic switching mechanism (3), automatic switching valves (14) are mounted in flow joining pipes (13) in the respective flow rate controllers (12), and the respective automatic switching valves (14) are switched by detecting a pressure downstream of the automatic switching valves (14). COPYRIGHT: (C)2010,JPO&INPIT
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