发明名称 NONVOLATILE MEMORY AND MANUFACTURING METHOD THEREOF
摘要 According to an aspect of the present invention, there is provided a nonvolatile memory including: a cell transistor including: a gate electrode and first and second diffusion layers; a second insulating film covering the cell transistor; first and second plugs penetrating the second insulating film to reach the first and second diffusion layers, respectively; a ferroelectric capacitor having a ferroelectric film and first and second electrodes, the first electrode contacting with the first plug; a first conductive spacer contacting with the second plug and including the same material as the first electrode; a third insulating film covering side faces of the first electrode, the ferroelectric film and the first conductive spacer; and a first wiring that is continuously formed with the second electrode and connected to the first conductive spacer and that includes the same material as the second electrode.
申请公布号 US2010052022(A1) 申请公布日期 2010.03.04
申请号 US20090549163 申请日期 2009.08.27
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KUMURA YOSHINORI
分类号 H01L27/115;H01L21/00;H01L21/336 主分类号 H01L27/115
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