发明名称 DEVICE AND PROCESS OF FORMING DEVICE WITH PRE-PATTERNED TRENCH AND GRAPHENE-BASED DEVICE STRUCTURE FORMED THEREIN
摘要 A graphene-based device is formed with a trench in one or more layers of material, a graphene layer within the trench, and a device structure on the graphene layer and within the trench. Fabrication techniques includes forming a trench defined by one or more layers of material, forming a graphene layer within the trench, and forming a device structure on the graphene layer and within the trench.
申请公布号 US2010051960(A1) 申请公布日期 2010.03.04
申请号 US20080201851 申请日期 2008.08.29
申请人 ADVANCED MICRO DEVICES, INC. 发明人 CHEN AN;KRIVOKAPIC ZORAN
分类号 H01L29/16;H01L21/04 主分类号 H01L29/16
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