METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT
摘要
Methods and devices for high-throughput printing of a precursor material for forming a film of a group IB-IIIA- chalcogenide compound are disclosed. In one embodiment, the method comprises forming a precursor layer on a substrate, the precursor is subsequently processed in one or more steps in a VIA environment.
申请公布号
WO2009151665(A3)
申请公布日期
2010.03.04
申请号
WO2009US36083
申请日期
2009.03.04
申请人
BOLLMAN, BRENT;LEIDHOLM, CRAIG, R.;STANLEY, NATHANIEL;RAIL, MATTHEW
发明人
BOLLMAN, BRENT;LEIDHOLM, CRAIG, R.;STANLEY, NATHANIEL;RAIL, MATTHEW