发明名称 METHODS AND DEVICES FOR PROCESSING A PRECURSOR LAYER IN A GROUP VIA ENVIRONMENT
摘要 Methods and devices for high-throughput printing of a precursor material for forming a film of a group IB-IIIA- chalcogenide compound are disclosed. In one embodiment, the method comprises forming a precursor layer on a substrate, the precursor is subsequently processed in one or more steps in a VIA environment.
申请公布号 WO2009151665(A3) 申请公布日期 2010.03.04
申请号 WO2009US36083 申请日期 2009.03.04
申请人 BOLLMAN, BRENT;LEIDHOLM, CRAIG, R.;STANLEY, NATHANIEL;RAIL, MATTHEW 发明人 BOLLMAN, BRENT;LEIDHOLM, CRAIG, R.;STANLEY, NATHANIEL;RAIL, MATTHEW
分类号 H01L31/042;H01L21/20;H01L21/324 主分类号 H01L31/042
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