SUBSTRATE-PROCESSING APPARATUS AND METHOD OF TRANSFERRING SUBSTRATE IN THE SAME

摘要

Provided is a substrate-processing apparatus including a storage member, a transfer member, and a control unit. The transfer member includes a plurality of transfer arms that load or pick up a substrate to or from the storage member. The control unit controls velocity of the transfer arms such that the simultaneously driven transfer arms simultaneously arrive at target points. Accordingly, the transfer member loads or takes out a plurality of wafers at once to or from the storage member, so that the substrate-processing apparatus reduces transfer time and improves productivity.