| 摘要 |
<p>A displacement sensor has a first electrode, a second electrode and a movable structure and detects displacement of the movable structure. The first electrode has comb teeth formed according to a predetermined cycle on the same surface. The second electrode has comb teeth arranged alternately with the comb teeth of the first electrode on the same surface. The movable structure has an opposed surface parallel to the first and second electrodes at predetermined intervals and is displaced in an inplane direction. The movable structure, in the opposed surface, has first areas at each cycle equal to the cycle and second areas which are adjacent to the first areas and arranged alternately with the first areas. Then, the first and second electrodes form capacitors with the first and second areas. A capacitance per the unit area of a capacitor formed of the first area and the first electrode is different from that per the unit area of a capacitor formed of the second area and the first electrode.</p> |
