PIEZOELECTRIC VIBRATOR, OSCILLATOR, ELECTRONIC APPARATUS AND RADIO CLOCK, AND MANUFACTURING METHOD OF PIEZOELECTRIC VIBRATOR

摘要

A piezoelectric vibrator comprising a base substrate and a lid substrate bonded to each other and having a cavity formed, an external electrode formed on the lower surface of the base substrate, an internal electrode so formed on the upper surface of the base substrate as to be contained in the cavity, a through electrode formed to penetrate the base substrate and electrically connect the external electrode with the internal electrode, a piezoelectric vibration piece contained in the cavity and electrically connected with the internal electrode, and a getter member composed of chromium or a metal material mainly containing chromium and formed in the cavity.