HEAT TREATING APPARATUS AND HEAT TREATING METHOD,申请号KR20040081977-传众专利搜索

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发明名称	HEAT TREATING APPARATUS AND HEAT TREATING METHOD
摘要
申请公布号	KR100944844(B1)	申请公布日期	2010.03.04
申请号	KR20040081977	申请日期	2004.10.14
申请人		发明人
分类号	H01L21/31;H01L21/324;C23C16/02;H01L21/00;H01L21/205;H01L21/304	主分类号	H01L21/31
代理机构		代理人
主权项
地址

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