INNER PLATE AND CRUCIBLE ASSEMBLY FOR DEPOSITION HAVING THE SAME

摘要

PURPOSE: An inner plate and a crucible assembly for deposition thereof are provided to multiply the internal pressure of the crucible assembly by changing the steam path of a depositing material from a linear form to a bypass curve form. CONSTITUTION: A main body(10) comprises an internal space and an opening(14) for storing a deposition material. An inner plate(30) covers the opening of the main body. A cap(50) includes a hole(52) in the top and covers the inner plate. An inner channel is included in order to emit the steam vapor of the deposition material through a hole to the outside. The inner plate comprises a first channel(35) and a second channel(37).