SCAN EXPOSURE APPARATUS AND SUBSTRATE FOR LIQUID CRYSTAL DISPLAY

摘要

PROBLEM TO BE SOLVED: To provide a scan exposure apparatus in which masks can be replaced while reliably preventing interference with an air pad by a mask replacing mechanism having a relatively simple configuration, and to provide a substrate for a liquid crystal display.

SOLUTION: A mask changer 2 of a proximity scan exposure apparatus 1 includes: a mask tray 41 capable of mounting a mask M on its upper face; a drive belt mechanism 42 disposed at a position higher than an air pad 21 and driving the mask tray 41 in the Y-direction; and a translatory guiding mechanism 44 guiding the mask tray 41 in a translatory manner so as not to contact with the air pad 21 upon moving the mask tray 41 below a mask holding section 11.

COPYRIGHT: (C)2010,JPO&INPIT