| 摘要 |
PROBLEM TO BE SOLVED: To provide a heat-conduction-type atmospheric pressure sensor of a simple structure and circuitry without the need of making use of electrostatic attraction drive and resonance, serving as an exciting means for vibrating a membrane in the prior art. SOLUTION: A membrane temperature sensor, a heating means and an exciting means are provided on a cantilever-shaped membrane, wherein the exciting means makes use of warpage due to difference in thermal expansion of two principal layers constituting the membrane while intermittently heated by the heating means of a membrane heater, and a silicon layer and a silicon thermally oxidized film with large difference in their thermal expansion coefficients are used as the two layers. COPYRIGHT: (C)2010,JPO&INPIT |
