MICRO ELECTRO-MECHANICAL SYSTEM MIRROR, MIRROR SCANNER, OPTICAL SCANNING UNIT AND IMAGE FORMING DEVICE USING OPTICAL SCANNING UNIT

摘要

PROBLEM TO BE SOLVED: To provide: a micro electro-mechanical system (MEMS) mirror using a double-sided mirror capable of solving a dynamic deformation problem without decline of the performance; a mirror scanner; an optical scanning unit; and an image forming device using an optical scanning unit. SOLUTION: The MEMS mirror comprises a mirror part having at least two surfaces each provided with one or a plurality of mirror surfaces, an operation part having a magnet frame part formed elongating from the mirror part to support a magnet, first and second fixed members formed with a distance each at both sides of the operation part, and first and second elastic parts for elastically supporting the operation part while each interlocking the operation part and the first and second fixed members. COPYRIGHT: (C)2010,JPO&INPIT