发明名称 ANNEALING FURNACE
摘要 <P>PROBLEM TO BE SOLVED: To provide an annealing furnace for effectively and quickly heating and cooling an element to be processed without loosing heat outside, and easily changing the element by positioning precisely with a direction selectively predetermined to a magnetic field, by a simple structure. Ž<P>SOLUTION: The annealing furnace includes: a magnet 2; a vacuum chamber 3 placed in a magnetic field generated by the magnet 2; a radiation shield 4 provided in the vacuum chamber 3; a heater 5 provided in a space surrounded by the radiation shield 4; a cooling means provided inside the heater 5; and a carrier 20 arranged in a space surrounded by the cooling means and placing a sample holder 7 supporting an element 19 to be processed. After eliminating magnetization of the element 19 by heating the element 19 with the heater 5 at a temperature of its Curie point or more by the heater, magnetization directions of the element 19 are arranged by lowering the temperature of the element 19 by the cooling means while applying a magnetic field. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010050301(A) 申请公布日期 2010.03.04
申请号 JP20080213536 申请日期 2008.08.22
申请人 NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE& TECHNOLOGY 发明人 FUKUSHIMA AKIO
分类号 H01L43/12;H01L43/08 主分类号 H01L43/12
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