| 摘要 |
<P>PROBLEM TO BE SOLVED: To easily carry out incident axis adjusting method of a scattered electron beam against an annular dark field scanning image detector regarding an incident axis adjusting method of a scattered electron beam against an annular dark field scanning image detector and a scanning transmission electron microscope. Ž<P>SOLUTION: In the transmission type electron microscope having an irradiation optical system composed of a focusing lens group to irradiate an electron beam generated from an electron gun onto a sample, a sample holder to retain the sample, a goniometer which controls an inclined angle of the sample holder and has a sample movement mechanism, and an image forming optical system composed of an objective lens group, an intermediate lens group, and a projector lens group in order to enlarge and image form the electron beam transmitted through the sample, this is equipped with the annular dark field scan image detector 13 to detect an enlarged image obtained by the image forming optical system, and scans the electron beam by using a deflecting coil of the projector lens group, and automatically adjusts an incident axis of the electron beam against the annular dark field scan image detector 13. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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