BIOCHIP LOW-TEMPERATURE BONDING METHOD USING DIRECT ATMOSPHERIC PLASMA

摘要

PURPOSE: A method for manufacturing microchip using direct atmospheric pressure plasma is provided to strengthen adhesive force of upper plate and lower plate and obtain stable microchip. CONSTITUTION: A method for manufacturing a microchip comprises: a step of performing plasma treatment of upper plate and lower plate at atmospheric pressure to modify surface; and a step of pressing the plate to attach the plate. The plasma is direct plasma. At the step of modifying surface, argon, helium is used to generate plasma.