| 摘要 |
PROBLEM TO BE SOLVED: To solve such a problem that when ozone concentration is not normally measured, an abnormality in an ozonizer cannot be detected. SOLUTION: An ozone generating apparatus is provided with a divider 10 to divide electric power supplied to an ozonizer 3 by a flow rate of a raw material gas supplied to the ozonizer, and a discriminator 11 in which an output signal from the divider and an output signal from an ozone concentration meter 4 are input. When an ozone concentration value determined for the quotient of electric power by a flow rate of the raw material gas is considered to be a normal ozone concentration value, the discriminator 11 sets an ozone concentration value lower than the normal ozone concentration value as an ozone concentration standard value, and discriminates an abnormality in the ozonizer when ozone concentration measured with the ozone concentration meter becomes the ozone concentration standard value or below. COPYRIGHT: (C)2010,JPO&INPIT
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